Package

Packaging for ALD and CVD precursors is far more than a simple container—it is an engineering solution that directly impacts the success of deposition processes. Given the extreme sensitivity of most precursors to air and moisture, the right packaging choice is essential for ensuring reproducibility and film purity.

The company approaches this as a collaborative effort, treating packaging as an integral part of customer partnership. This means that selecting or designing a vessel always begins with a thorough analysis of client’s specific delivery system, process requirements, and operational constraints.

Vessel Types and Standard Offerings

• - Standard Solutions: A large inventory of ready-to-ship bubblers and cylinders, optimized for common ALD/CVD systems, is maintained. Multiple canister configurations are also available.
• - Scalability: Sizes range from 200ml evaluation samples to production-scale (HVM) vessels.
• - Material and Purity: Vessels are manufactured from 316L stainless steel with electropolished interiors—a critical feature for minimizing trace contamination and particle generation.
• - Connection Flexibility: Standard fittings are VCR connections, with customizable valve options to match your specific setup.